The mechanical analysis of MEMS pendulous oscillating gyroscopic accelerometer

Abstract

We present mechanical analysis on a pendulous oscillating gyroscopic accelerometer( POGA) which is designed according to three-dimensional macro pendulous integrating gyroscopic accelerometer( PIGA). The motion equation of a capacitance read-out micro-machined gyroscopic accelerometer under an electrostatic comb-driver is derived by using the moment of inertia and the gyroscopic effect.The mechanical behavior of the main beam element is discussed basing on all motion equations of elements in the system. By using ANSYS,modal analysis on the POGA is done numerically and the vibration modes and corresponding frequencies are obtained. Our result shows that the POGA sensor has a good linearity within a specific frequency range,which is important for the design of the sensor.