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Title: The similarity laws of MEMS gyro with temperature changes
Authors: Sun, BoHua 
Issue Date: 2014
Publisher: ICSV 21
Source: ICSV 21 12th International Congress on Sound and Vibration, Beijing, 13-17 July 2014
Abstract: The performance of MEMS gyro is affected by several factors, and one of them is the change of temperature. To design a higher performance MEMS gyro, the temperature compensation should be taken into account. Due to its complicated nature, the temperature data has to been collected via experiments. Dimensional analysis should was used to find the similarity law of temperature effects on resonant frequency, Q factor and voltage output. Since there were no restrictions on the MEMS gyro structure, it appears that all the similarity laws may be valid to any other mechanical or electro-mechanical system
Description: 21st International Congress on Sound and Vibration (ICSV21), Beijing, China, 13-17 July 2014
Appears in Collections:Eng - Conference Papers

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